Field-emission electron gun for a MEMS electron microscope
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Microsystems & Nanoengineering
سال: 2021
ISSN: 2055-7434
DOI: 10.1038/s41378-021-00268-9